Material Fabrication and Nano Characterization Lab
The Material Fabrication and Nano Characterization Lab is located in 122 Engineering Hall. The 2000-square-foot space is currently used both for undergraduate teaching and research. Major equipment in this lab includes:
- Chemical fume hoods (2)
- Laminar-flow clean bench
- Point source deionized water system (Millipore Direct Q3)
- Contact mask aligner (Canon PLA-501A)
- Spin coater (CEE 100CB)
- Vacuum oven (Isotemp Model 281A)
- Dual target sputterer (Anantech Hummer 6.6)
- Thermal evaporator (Edwards E306A with turbo pump)
- Reactive ion etching system (Nordson MARCH, Model RIE-1701)
- UV ozone cleaning system (Novascan PSD Pro-UV4)
- Desktop microplotter (Sonoplot GIX)
- Atomic force microscope with fluid cell and electrochemical cell (AsylumResearch MFP -3D-Bio)
- Portable atomic force microscope (NanoSurf EasyScan)
- Variable pressure scanning electron microscope (Hitachi SU1510) with EDX spectrometer (Bruker QUANTAX 100)
- Electron-beam lithography system (J.C. Nabity NPGS interfaced with Hitachi SU1510 SEM)
- Tube furnace for annealing and dry oxidation, 3" tube (Carbolite GHA 12/300)
- Portable scanning electron microscope (Hitachi TM-1000)
- Inverted optical microscope (Olymus IX71)
- Optical microscope (Olympus BX-51 100X)
- Cooled fluorescence microscopy camera (Qimaging EXi Blue)
- Stylus profilometer (Dektak XT)
- Dynamic MEMS profiler (Optopro 622)
- UV-Vis spectrometer (Ocean Optics)
- Contact angle goniometer (home built)
