Material Fabrication and Nano Characterization Lab

The Material Fabrication and Nano Characterization Lab is located in 122 Engineering Hall. The 2000-square-foot space is currently used both for undergraduate teaching and research. Major equipment in this lab includes:

• Chemical fume hoods (2)
• Laminar-flow clean bench
• Point source deionized water system (Millipore Direct Q3)
• Contact mask aligner (Canon PLA-501A)
• Spin coater (CEE 100CB)
• Vacuum oven (Isotemp Model 281A)
• Dual target sputterer (Anantech Hummer 6.6)
• Thermal evaporator (Edwards E306A with turbo pump)
• Reactive ion etching system (Nordson MARCH, Model RIE-1701)
• UV ozone cleaning system (Novascan PSD Pro-UV4)
• Desktop microplotter (Sonoplot GIX)
• Atomic force microscope with fluid cell and electrochemical cell (AsylumResearch MFP -3D-Bio)
• Portable atomic force microscope (NanoSurf EasyScan)
• Variable pressure scanning electron microscope (Hitachi SU1510) with EDX spectrometer (Bruker QUANTAX 100)
• Electron-beam lithography system (J.C. Nabity NPGS interfaced with Hitachi SU1510 SEM)
• Tube furnace for annealing and dry oxidation, 3" tube (Carbolite GHA 12/300)
• Portable scanning electron microscope (Hitachi TM-1000)
• Inverted optical microscope (Olymus IX71)
• Optical microscope (Olympus BX-51 100X)
• Cooled fluorescence microscopy camera (Qimaging EXi Blue)
• Stylus profilometer (Dektak XT)
• Dynamic MEMS profiler (Optopro 622)
• UV-Vis spectrometer (Ocean Optics)
• Contact angle goniometer (home built)