Clean Room (EGH)

Engineering Hall

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Engineering Hall (EGH), located next to Southwest Hall on the University of Wisconsin-Platteville campus, houses a class 100,000 clean room.

There are many instruments currently available for use by faculty/staff/students including:

  • Zeiss Leo 982 FESEM
  • Asylum Research AFM with inverted microscope
  • MEMS profiler with probes
  • Reactive Ion Etcher
  • Anatech Hummer sputter coater with two guns for sequential coatings
  • Denton Evaporative coater
  • Mask aligner with front and back alignment
  • More instruments coming as the multi-user facility continues to expand…

As the facility expands there will be many more instruments and increased capability.  Check back soon for a more complete overview of the clean room including images.

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